• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
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  • 优先权
    • 专利摘要:
    PURPOSE: An inorganic-organic compound material and a thermal optical waveguide using the compound material are provided to obtain excellent waveguide loss characteristic and thermal stability of the waveguide. CONSTITUTION: An inorganic-organic compound material used for fabricating a thermal optical waveguide is formed by sol-gel method. The inorganic-organic compound material has a mesh structure in which oxygen atoms combined with silicon or organic monomer is linked. The inorganic-organic compound material is fabricated using a silicon compound as a starting material.
    公开号:KR20040069491A
    申请号:KR1020030005908
    申请日:2003-01-29
    公开日:2004-08-06
    发明作者:배병수；강은석；박장웅
    申请人:한국과학기술원；
    IPC主号:
    专利说明:

    Inorganic-Organic Hybrid Materials and Thermo-Optic Waveguide Devices for Optical Communication
    [1] BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thermo-optic waveguide device, and more particularly, to a thermo-optical waveguide device including an inorganic-organic hybrid material having a wide range of thermo-optic effects as a raw material required for forming a core and a clad of a thermo-optic waveguide device. It is about.
    [2] The thermo-optic effect is a phenomenon in which the refractive index changes according to the temperature change of the material (dn / dT), and it is used to heat the optical switch, the optical modulator, the variable optical attenuator, the optical variable filter, the optical drop multiplexer, and the optical cross connector. An optical optical waveguide device is fabricated. In recent years, a temperature-independent Awave Waveguide device is fabricated using the thermo-optic effect of an optical waveguide material to prevent the change of the characteristics of an optical device according to the ambient temperature with the development of a wavelength division transmission system in optical communication.
    [3] As a conventional technique related to the present invention, according to Japanese Patent Application Laid-Open No. Hei 6-34924, an optical phase modulator in which a quartz glass optical waveguide having a core portion and a cladding portion surrounding the core portion is provided on a silicon substrate and a thin film heater is disposed in the vicinity thereof. The present invention discloses a Mach-Zehnder type thermo-optic switch capable of converting an optical path.
    [4] According to Japanese Patent No. 2000-241781, a polymer optical waveguide having a core portion and a clad portion surrounding the core portion on a substrate and a thin film heater are installed on the upper portion of the optical waveguide, and the thin film heater is heated to improve the refractive index of a portion near the core portion. A polymer thermo-optical device is disclosed that has a light path switching function and a variable wavelength selection function of light that has changed and guided the core.
    [5] In addition, Professor Y.Kokubun of Japan produced a temperature-independent Awave Waveguide that uses the thermo-optic effect of materials to prevent the characteristics of the optical device from changing according to the ambient temperature. This is based on the fact that the optical path does not change with temperature in the case of an optical waveguide having a quartz glass core and a polymer material clad ( Electron. Lett. , Vol. 34, No. 4, p. 367 (1998). )). However, in the case of quartz glass and polymers, the range of thermo-optic coefficients is limited, which makes it difficult to manufacture a complete temperature independent optical waveguide and has a disadvantage of complicated design.
    [6] As described above, the conventional thermo-optic optical waveguide device uses quartz glass or polymer and has the following characteristics.
    [7] 1. Quartz-based glass: It is manufactured by vapor deposition such as Flame Hydrolysis Deposition (FHD) and Chemical Vapor Deposition (CVD), and has low light loss (<0.01dB / cm), connection loss and It has excellent thermal and chemical stability. However, the quartz glass optical waveguide requires a high temperature manufacturing process of 1000 ° C. or more and expensive manufacturing equipment, and has a problem of causing birefringence due to polarization due to thermal stress of the high temperature process. In addition, since the heat transfer rate is low and the thermal optical coefficient has a low value of about 10 -5 / ℃, the operating power required for driving the device is very large and the reaction time is slow.
    [8] 2. Polymers: Polymers can be easily controlled and synthesized by molecular chemistry and the manufacturing process is simple and low temperature, so it is economical and can be applied to various processes. In addition, it has a large thermo-optic coefficient of about -10 -4 / ℃, so that the device can be driven with low power and the manufacturing method is simple. However, in practice, optical waveguide loss due to vibration in the molecular structure, polarization-dependent birefringence, and thermal There is limited application because of instability.
    [9] The technical problem to be achieved by the present invention is to improve the shortcomings of the quartz glass and polymer used to fabricate the conventional thermo-optic optical waveguide device, the thermo-optic coefficient is easy to control, wide size, excellent brightness The present invention provides a thermo-optic optical waveguide device including a breakage chamber and an inorganic-organic hybrid material exhibiting thermal stability.
    [10] In order to achieve the above object, the thermo-optic optical waveguide device-producing inorganic-organic hybrid material of the present invention is prepared by the sol-gel method, and is a crosslinked crosslinked with an oxygen atom bonded to silicon in the structure or an organic monomer capable of crosslinking or modification. And inorganic-organic hybrid materials (hereinafter referred to as organosilicon compounds) having a structure.
    [11] The organosilicon compound of the present invention can be prepared by using the silicon compounds represented by the following general formulas 1 to 3 as starting materials.
    [12] <Formula 1>
    [13] (OR 1 ) n Si-R 2 m (n + m = 4)
    [14] <Formula 2>
    [15] (OR 1 ) n Si- (XR 3 ) m (n + m = 4)
    [16] <Formula 3>
    [17] R 4 SiCl 3
    [18] In general formulas 1 to 3, R 1 is a straight-chain or branched chain alkyl group such as methyl, ethyl, propyl, or butyl having 1 to 10 carbon atoms or a hydrogen atom in which these groups are hydrolyzed, and R 2 is a straight chain having 1 to 4 carbon atoms. Or a branched alkyl group, a phenyl group, a phenyl alkoxy group, or an amine group. In addition, n is a natural number of 1-4, m represents the integer of 0-3.
    [19] X is a carbon chain having 3 to 6 carbon atoms, and R 3 represents a substance containing a vinyl group, a glycidoxy group, a methacryl group, or a fluoride atom substituted in a carbon chain having 4 to 8 carbon atoms.
    [20] R 4 is a fluoride valence in a carbon chain having 1 to 10 carbon atoms, or a straight or branched alkyl group or a hydrogen atom, a phenyl group, a phenyl alkoxy group, an amine group, a vinyl group, a glycidoxy group or a methacryl group or a carbon chain having 4 to 8 carbon atoms. Substituted material.
    [21] Examples of specific compounds belonging to the general formulas (1) to (3) include tetramethoxysilane, tetraethoxysilane, tetrapropoxysilane, tetrabutoxysilane, vinyltriethoxysilane, vinyltrimethoxysilane, vinyltripropoxysilane, Vinyltriacetoxysilane, vinyldimethoxyethoxysilane, aminopropyltriethoxysilane, aminopropyltrimethoxysilane, aminopropyltripropoxysilane, N- (3-acryloxy-2-hydroxypropyl) -3 -Aminopropyltriethoxysilane, N- (3-acryloxy-2-hydroxypropyl) -3-aminopropyltrimethoxysilane, 3-acryloxypropyldimethoxysilane, 3-acryloxypropyldiethoxysilane, 3-acryloxypropyldipropoxysilane, 3- (meth) acryloxypropyltrimethoxysilane, 3- (meth) acryloxypropyltriethoxysilane, 3- (meth) acryloxypropyltripropoxysilane, N -(2-aminoethyl-3-aminoprop Phil) -trimethoxysilane (DIAMO), N- (2-aminoethyl-3-aminopropyl) -triethoxysilane, N- (2-aminoethyl-3-aminopropyl) -tripropoxysilane, N -(2-aminoethyl-3-aminopropyl) -tributoxysisilane, trimethoxysilylpropyldiethylenetriamine (TRIAMO), triethoxysilylpropyldiethylenetriamine, tripropoxysilylpropyldiethylenetri Amine, tributoxysilylpropyldiethylenetriamine, 2-glycidoxyethylmethoxysilane, 3-glycidoxypropyltrimethoxysilane, 3-glycidoxypropyltriethoxysilane, 2-glycidoxypropyl Trimethoxysilane, 2-glycidoxypropyltriethoxysilane, 2-glycidoxyethylmethyldimethoxysilane, 2-glycidoxyethylmethyldiethoxysilane, 3-glycidoxyethylmethyldimethoxysilane, 3 Glycidoxypropylethyldimethoxysilane, 3-glycidoxypropylethyldimethoxysilane, 3-glycidoxypropylethyldi Methoxysilane, 2-glycidoxypropylethyldiethoxysilane, 2-glycidoxypropylethyldimethoxysilane, 2- (3,4-ethoxycyclohexyl) ethyltrimethoxysilane, 2- (3,4- Ethoxycyclohexyl) ethyltriethoxysilane, ethyltrimethoxysilane, methyltriethoxysilane, 3-chloropropyltrimethoxysilane, 3-chloropropyltripropoxysilane, 2-chloropropyltributoxysilane, Phenyltrimethoxysilane, Phenyltriethoxysilane, 3,3,3, -trifluoropropyltrimethoxysilane, dimethyldimethoxysilane, 3-chloropropylmethyldimethoxysilane, methyltrichlorosilane, ethyltrichlorosilane , Phenyltrichlorosilane, vinyltrichlorosilane, hexyltrichlorosilane or decyltrichlorosilane.
    [22] The first method for preparing an organosilicon compound according to the present invention is to prepare a mixed solution of water and alcohol of the substances represented by the general formulas 1 to 3 above, preferably by adding an acid or a base catalyst to hydrolysis and condensation ( condensation) process. Organosilicon compounds through a gelation process in which the silanes represented by Formulas 1 and 2 are transferred to a gel state from a sol state to a gel state through a continuous reaction of hydrolysis and condensation reactions represented by Formula 1 below. To prepare.
    [23] As the organic monomer capable of intermolecular crosslinking in the material of Formula 2, when a vinyl group, glycidoxy group, and methacryl group are included, an organic polymerization reaction represented by Chemical Formula 3 is included. It is preferable when the organic group substituted in the silicon is vinyl group or methacryl group (preferably methacryloxy group). Let's do it. When glycidoxy group is included, organic polymerization may be preferably performed through a ring opening reaction using aluminum alkoxide, titanium alkoxide, zirconium alkoxide, amine group or the like.
    [24] <Formula 1>
    [25] [Hydrolysis]
    [26] M (OR) x + xH 2 O ↔M (OH) x + xROH
    [27] [Condensation]
    [28] ≡M (OH) + (HO) M≡ ↔ ≡MOM≡ + H 2 O
    [29] [Water condensation]
    [30] ≡M (OR) + (HO) M≡ ↔ ≡M-O-M≡ + ROH
    [31] [Alcohol condensation]
    [32] According to a second method for preparing an organosilicon compound according to the present invention, reactants such as silicon chloride, methyltrichlorosilane, ethyltrichlorosilane, and phenyltrichlorosilane represented by the general formula (3) are preferably reacted with silicon alkoxide or alkyl ether. It includes a process of preparing an organosilicon compound having a polymer oxide structure through a reaction represented by the following Chemical Formula 2 using a chloride, for example, zirconium chloride, titanium chloride, tin chloride, or the like.
    [33] <Formula 2>
    [34] RSiCl 3 + 0.75 Si (OR`) 4 → [RSi 1.75 O 3 ] n + 3R`Cl
    [35] 0.75SiCl 4 + RSi (OR`) 3 → [RSi 1.75 O 3 ] n + 3R`Cl
    [36] RSiCl 3 + RSi (OR`) 3 → [R 2 Si 2 O 3 ] n + 3R`Cl
    [37] 2RSiCl 3 + 3R` 2 O → [R 2 Si 2 O 3 ] n + 6R`Cl
    [38] RSiCl 3 + Si (OR`) 4 → [RSi 2 O 3 -OR`] n + 3R`Cl
    [39] SiCl 4 + RSi (OR`) 3 → [RSi 2 O 3 -Cl] n + 3R`Cl
    [40] R ′ in Formula 2 is a straight or branched alkyl group having 1 to 10 carbon atoms, and R is a straight or branched alkyl group having 1 to 10 carbon atoms or a hydrogen atom, a phenyl group, a phenyl alkoxy group, an amine group, a vinyl group, or a glycidoxy group. Or a substance containing a methacryl group or a fluoride atom substituted in a carbon chain having 4 to 8 carbon atoms.
    [41] A third method for producing an organosilicon compound according to the present invention includes a step of reacting silicon oxide particles (eg, silica sol) in a form dispersed in water or alcohol with substances represented by the general formulas (1) and (2). do. The silica sol includes silicon oxide particles having a size of 5 to 20 nm surface-treated to prevent reaction between the particles and water or an alcohol solvent having an acid or base pH to disperse them. The organosilicon compound may be prepared by hydrolysis and condensation of the silica sol and the silanes represented by Formulas 1 and 2 shown in Formula 1.
    [42] The organosilicon compound according to the present invention can be produced by the above three methods and can change the structure and properties of the final material according to the type of organic material added. In organosilicon compounds, organic material plays a role of a network former and a network modifier in a network structure largely crosslinked with oxygen atoms. For example, organic substances that cannot bind to other organic monomers or inorganic network such as phenyl group or amine group play a role of modifier in organosilicon compound. If the added organic substance is an organic substance such as glycidoxy group, methacryl group, or vinyl group, it can act as a crosslinking agent to form a new bond through bonding with other organic monomers or other organic substances in the inorganic network structure. .
    [43] <Formula 3>
    [44] O 3 ≡Si-R + R`-Si≡O 3 → O 3 ≡Si-RR`-Si≡O 3
    [45] O 3 ≡Si-R + R + R + R`-Si≡O 3 → O 3 ≡Si-RRRR`-Si≡O 3
    [46] R, R` in Formula 3 is an organic monomer capable of crosslinking and has an unsaturated hydrocarbon such as a double bond or a triple bond or an unstable ring structure. Representative examples of such bonds or structures include vinyl groups, methacryl groups, glycidoxy groups, and the like.
    [47] In the organosilicon compound according to the present invention, the thermo-optic coefficient shows a negative value and can be adjusted to a range that cannot be obtained from quartz glass and polymer, which are conventional optical waveguide materials. That is, the organosilicon compound can adjust the thermo - optic coefficient in a wide range of about -0.2x10 -4 / ℃ to -3x10 -4 / ℃. Since organosilicon compounds are prepared in solution, the starting concentration can be easily changed, and the ratio between the inorganic mesh structure and the organic material can be adjusted from the starting concentration. For example, if tetramethoxysilane and phenyltrimethoxysilane are used as starting materials, the more tetramethoxysilane, the more the end product will have an inorganic network structure, and the more phenyltrimethoxysilane, the more organic matter. The refractive index and thermo-optic coefficient of the final product can be adjusted by controlling the ratio of the inorganic network structure and the organic material by the starting material. The adjustment of the thermo-optic coefficient increases in the negative direction as the ratio of organic matter in the organosilicon compound increases.
    [48] The organosilicon compound according to the present invention can adjust the thermo-optic coefficient through the selection of the starting material. When the organic material in the starting material acts as a modifier, the larger the molecular weight of the organic material is, the higher the thermo-optic coefficient is in the negative direction. For example, when the modified organic material is an ethyl group than when the methyl group, the thermo-optic coefficient shows a larger negative value.
    [49] In addition, when the organosilicon compound according to the present invention contains an organism capable of organic polymerization, a thermo-optic system is formed through polymerization or crosslinking reaction between organic groups by irradiation of strong light such as heat or ultraviolet rays after addition of a suitable initiator. You can adjust the number. The polymerization or crosslinking of these organisms increases the organic mesh of the organosilicon compound and the thermo-optic coefficient increases in the positive direction.
    [50] In the present invention, since the organosilicon compound is prepared in the liquid phase, inorganic or organic substances having special physical properties can be easily and uniformly added. Not only the thermo-optic coefficient is adjusted by the properties of the added inorganic or organic material, but additional properties can be given. For example, when aluminum alkoxide, germanium alkoxide and zirconium alkoxide are added, the thermo-optic coefficient may increase in the positive direction and also increase the refractive index, the intensity, the photosensitivity, and the like. In addition, when the silane or organic monomer substituted with a fluorine atom is added, the thermo-optic coefficient may be increased to a negative value, and the optical waveguide loss and refractive index may be reduced. In addition, when silica, boehmite, alumina, and zirconia metal oxide particles are dispersed in a solvent such as water or alcohol in the organosilicon compound, the thermo-optic coefficient of the organosilicon compound may increase in the positive direction and the refractive index and strength may also increase. have.
    [51] The organosilicon compound according to the present invention has the advantage of being able to form a film by a relatively easy coating process such as spin coating method, dip coating method, bar coating method because it is prepared from the liquid state and easy to change the viscosity. The thickness of the coating film can be adjusted by changing the viscosity, and a uniform coating film can be obtained. An optical waveguide having a high refractive index from the coating layer and an upper / lower cladding portion having a lower refractive index surrounding the core portion, wherein at least one region of the core portion and the cladding portion includes the organosilicon compound according to the present invention and has a different thermal optical coefficient. Can be produced. By using such an optical waveguide, it is possible to manufacture a thermo-optic device that can control the characteristics of the light to be guided.
    [52] Hereinafter, the content of the present invention will be described in more detail with reference to Examples. However, these examples are only presented to understand the content of the present invention, and the scope of the present invention should not be construed as being limited to these embodiments.
    [53] <Example 1>
    [54] 12 hours in which 0.1N HCl was added to phenyltrimethoxysilane (PhTMS) in a 1: 3 molar ratio, and 0.1N HCl was added to tetramethoxy orthosilicate (TMOS) in a 1: 2 molar ratio. Stirring was carried out to carry out the sol-gel reaction. The molar ratio of phenyltrimethoxysilane and tetramethoxy orthosilicate at the time of mixing was adjusted as shown in Table 1 to adjust the composition of the coating film finally obtained. The mixed solution was extracted with methanol in the solution for 20 minutes while maintaining a temperature of 60 degrees Celsius in a vacuum evaporator.
    [55] The final solution was coated onto a silicon substrate using a spin coater and then heat treated at 180 degrees Celsius for 12 hours. The thickness of the coated film has a thickness of 3 ~ 4㎛, and the thermal stress (thermal stress) acts on the coating film during cooling, gradually cooling to the temperature of 150 ℃, 120 ℃, 80 ℃, 40 ℃ step by step the final coating film Was prepared.
    [56] Table 1 below shows the thermo-optic coefficient according to the molar ratio (PhTMS / TMOS) of phenyltrimethoxysilane and tetramethoxy orthosilicate. The thermo-optic coefficient was measured as a refractive index change with temperature after linearly approximating the value of the refractive index measured in the temperature range of 30 to 100 degrees Celsius by forming a film to be measured on a silicon substrate and installing a thermal control device on the prism coupler. (App.Phy. Lett., Vol. 81, No. 8, pp. 1438-14 (2002))
    [57] TABLE 1
    [58] PhTMS / TMOSThermo-optic Coefficient (x10 -4 / ℃) 0.5-1.35 One-1.84 2-2.15 3-2.56 4-3.01
    [59] <Example 2>
    [60] 0.1N HCl was added to 3-methacryloxypropyltrimethoxysilane (MPTS) in a 1: 3 molar ratio and 0.1N HCl was added to perfluoroalkylsilane (PFAS) in a 1: 2 molar ratio. The solution was mixed and stirred for 24 hours to conduct a sol-gel reaction. During mixing, the molar ratio of 3-methacryloxypropyltrimethoxysilane and perfluoroalkylsilane was adjusted as shown in Table 2 to adjust the composition of the coating film finally obtained. The subsequent process was carried out in the same manner as in Example 1 and the thickness of the coated film was 7 ~ 10㎛. Table 2 below shows the thermo-optic coefficient according to the molar ratio (PFAS / MPTS) of 3-methacryloxypropyltrimethoxysilane and perfluoroalkylsilane.
    [61] TABLE 2
    [62] PFAS / MPTSThermo-optic Coefficient (x10 -4 / ℃) 0.5-2.11 One-2.34 2-2.60 3-2.82 4-3.02
    [63] <Example 3>
    [64] Methyl silicon trichloride (MSTC) and tetraethyl orthosilicate (TEOS) were stirred for 30 minutes in a nitrogen atmosphere with low moisture. At this time, the molar ratio of methylsilicon trichloride and tetraethyl orthosilicate was adjusted as shown in Table 3 to adjust the composition of the coating film finally obtained. Iron chloride (FeCl 3 ) was added as a catalyst of the reaction at 1% by weight of the total silicon, followed by stirring at a temperature of 35 ° C. for 12 hours to perform a sol-gel reaction. The subsequent process was carried out in the same manner as in Example 1 and the thickness of the coated film was 8 ~ 10㎛. Table 3 shows the thermo-optic coefficients according to the molar ratio (MSTC / TEOS) of methyl silicon trichloride and tetraethyl orthosilicate.
    [65] TABLE 3
    [66] MSTC / TEOSThermo-optic Coefficient (x10 -4 / ℃) 0.5-0.70 One-0.89 2-1.19 3-1.44 4-1.61
    [67] <Example 4>
    [68] 0.1N HCl was added to 3-methacryloxypropyltrimethoxysilane (MPTS) in a 1: 3 molar ratio, and 0.1N HCl was added to tetramethoxy orthosilicate (TMOS) in a 1: 2 molar ratio. After the solution was mixed and stirred for 12 hours, the mixed solution was extracted in methanol in the solution for 20 minutes while maintaining the temperature at 60 ° C. in a vacuum evaporator. And benzoyl peroxide, an acrylic organic polymerization initiator, was added in an amount of 3% by weight of silicon atoms, followed by stirring for 1 hour. The final solution was coated on a silicon substrate using a spin coater, and then the amount of ultraviolet irradiation was adjusted as shown in Table 4 to adjust the degree of organic polymerization. After the heat treatment was performed in the same manner as in Example 1. Table 4 shows the thermo-optic coefficient according to the amount of ultraviolet radiation.
    [69] TABLE 4
    [70] UV dose (J / cm 2 )Thermo-optic Coefficient (x10 -4 / ℃) 0-1.75 2.7-1.67 13.5-1.60 27-1.47 81-1.37 162-1.18
    [71] Example 5
    [72] A solution containing 0.1N HCl in a 1: 3 molar ratio to 3-glycidoxypropyltrimethoxysilane (GPTS) and a solution containing 0.1N HCl in a 1: 2 molar ratio to tetramethoxy orthosilicate (TMOS) The mixture was stirred for 12 hours, and then aluminum 2-butoxide, an epoxy organic polymerization initiator, was added, followed by stirring for 3 hours. At this time, the amount of aluminum 2-butoxide was adjusted as shown in Table 5 to adjust the epoxy organic polymerization degree. The mixed solution was extracted with methanol in the solution while maintaining the temperature at 60 ° C. in a vacuum evaporator. The subsequent process was performed in the same manner as in Example 4. Table 5 shows the thermo-optic coefficient according to the degree of epoxy organic polymerization.
    [73] TABLE 5
    [74] Aluminum 2-butoxide (wt%)Thermo-optic Coefficient (x10 -4 / ℃) 0-1.81 One-1.59 3-1.42 5-1.33 10-1.27
    [75] <Example 6>
    [76] To the 3-methacryloxypropyl trimethoxysilane (MPTS) was added a solution of 0.1N HCl in a 1: 3 molar ratio and the silica sol stabilized at pH 3 was stirred for 5 hours. The molar ratio of 3-methacryloxypropyltrimethoxysilane and silica sol upon mixing was adjusted as indicated in Table 6 below. Coating and heat treatment of the final solution was carried out in the same manner as in Example 1. Table 6 shows the thermo-optic coefficients according to the molar ratio (MPTS / silica sol) of 3-methacryloxypropyltrimethoxysilane and silica sol.
    [77] TABLE 6
    [78] MPTS / SilicazolThermo-optic Coefficient (x10 -4 / ℃) 0.5-0.22 One-0.54 2-0.81 3-1.17 4-1.34
    [79] <Example 7>
    [80] The molar ratio of 3-methacryloxypropyltrimethoxysilane (MPTS) and diphenylsilanediol (DPDS) was adjusted and mixed as indicated in Table 7 below, and the solution was stirred for 30 minutes. Barium hydroxide (Ba (OH) 2 ) was slowly added to the stirred solution as 5 wt% of the total silicon atoms as a catalyst of the reaction, and then reacted at a temperature of 60 ° C. for 3 hours using a vacuum evaporator. The final solution was prepared in the final membrane as in Example 3 using a bar coater. Coating and heat treatment of the final solution was carried out in the same manner as in Example 1. Table 6 shows thermooptic coefficients according to the molar ratio (DPDS / MPTS) of 3-methacryloxypropyltrimethoxysilane and diphenylsilanediol.
    [81] TABLE 7
    [82] DPDS / MPTSThermo-optic Coefficient (x10 -4 / ℃) 0.5-2.07 One-2.23 2-2.50 3-2.69 4-2.88
    [83] As described above, the thermo-optic waveguide material according to the present invention facilitates the design and fabrication of thermo-optic waveguide devices by controlling thermo-optic coefficients in a wider range than conventional quartz-based glass and polymer materials. To improve the effect.
    权利要求:
    Claims (15)
    [1" claim-type="Currently amended] In the thermo-optic waveguide device,
    Thermo-optical optical waveguide device manufactured by the sol-gel method, characterized in that it comprises an organosilicon compound having a network structure of oxygen atoms bonded to silicon or crosslinked or modified organic monomers in the structure
    [2" claim-type="Currently amended] The method of claim 1,
    The organosilicon compound is a thermo-optic optical waveguide device, characterized in that the compound represented by the following formula (1) through a hydrolysis and condensation reaction in the presence of an acid or a base catalyst
    (OR 1 ) n Si-R 2 m (n + m = 4)
    In the above, R 1 is a straight or branched chain alkyl group or hydrogen atom having 1 to 10 carbon atoms, R 2 is a straight or branched chain alkyl group having 1 to 4 carbon atoms, a phenyl group, a phenyl alkoxy group, an amine group, n is a natural number of 1 to 4, m is an integer between 0 and 3.
    [3" claim-type="Currently amended] The method of claim 2,
    The thermo-optic optical waveguide device, characterized in that the thermosilic acid coefficient of the organosilicon compound by adjusting the mixing composition of the compound selected from the group of compounds represented by the general formula (1).
    [4" claim-type="Currently amended] The method of claim 1,
    The organosilicon compound is a thermo-optical optical waveguide device, characterized in that the compound formed by the hydrolysis and condensation reaction of the compound represented by the general formula (2) in the presence of an acid or a base catalyst.
    (OR 1 ) n Si- (XR 3 ) m (n + m = 4)
    In the above, R 1 is a linear or branched alkyl group or hydrogen atom having 1 to 10 carbon atoms, X is a carbon chain having 3 to 6 carbon atoms, R 3 is a vinyl group, glycidoxy group, methacryl group or 4 to 8 carbon atoms Substituted fluoride atoms in individual carbon chains, n is a natural number from 1 to 4, m is an integer from 0 to 3.
    [5" claim-type="Currently amended] The method of claim 4, wherein
    Thermo-optic optical waveguide device, characterized in that the organosilicon compound with the thermo-optic coefficient is adjusted by adjusting the mixing composition of the compound selected from the group of compounds represented by the general formula (2).
    [6" claim-type="Currently amended] The method of claim 1,
    The organosilicon compound is a thermo-optical optical waveguide device, characterized in that the compound obtained by reacting the organic halogen silane represented by the general formula (3) with a silicon alkoxide or alkyl ether.
    R 4 SiCl 3
    R 4 is a linear or branched alkyl group having 1 to 10 carbon atoms or a hydrogen atom, a phenyl group, a phenyl alkoxy group, an amine group, a vinyl group, a glycidoxy group, a methacryl group, or a 4 to 8 carbon chain in a carbon chain. Substituted Substituted Substances.
    [7" claim-type="Currently amended] The method of claim 6,
    A thermo-optic optical waveguide device characterized in that the catalyst is metal chloride.
    [8" claim-type="Currently amended] The method of claim 6,
    A thermo-optic optical waveguide device, characterized in that the organosilicon compound having a thermo-optic coefficient controlled by adjusting a mixing composition of a compound selected from the group of compounds represented by the general formula (3).
    [9" claim-type="Currently amended] The method of claim 1,
    The organosilicon compound is a thermo-optical optical waveguide device obtained by reacting silicon oxide particles dispersed in water or alcohol with at least one compound represented by the general formula (1) or (2).
    Formula 1:
    (OR 1 ) n Si-R 2 m (n + m = 4)
    R 1 is a straight or branched chain alkyl group having 1 to 10 carbon atoms or a hydrogen atom. R <2> is a C1-C4 linear or branched alkyl group, a phenyl group, a phenyl alkoxy group, and an amine group. n is a natural number between 1 and 4, and m is an integer between 0 and 3.
    Formula 2:
    (OR 1 ) n Si- (XR 3 ) m (n + m = 4)
    R 1 is a straight or branched chain alkyl group having 1 to 10 carbon atoms or a hydrogen atom. X is a carbon chain having 3 to 6 carbon atoms. R 3 is a substance containing a vinyl group, glycidoxy group, methacryl group or a fluoride atom substituted in a carbon chain having 4 to 8 carbon atoms. n is a natural number between 1 and 4, and m is an integer between 0 and 3.
    [10" claim-type="Currently amended] The method of claim 1,
    The optical waveguide device is a thermo-optical waveguide device, characterized in that at least one layer of the lower cladding layer, the core layer and the upper cladding layer formed on the planar substrate comprises an organosilicon compound.
    [11" claim-type="Currently amended] Thermo-optic optical waveguide device functional organosilicon polymerized by addition of free radicals and an organic polymerization initiator to the same or different compounds including organic monomers capable of crosslinking with organic groups substituted with silicon among the compounds represented by the following general formula (2) Preparation of Compound
    (OR 1 ) n Si- (XR 3 ) m (n + m = 4)
    R 1 is a straight or branched chain alkyl group having 1 to 10 carbon atoms or a hydrogen atom. X is a carbon chain having 3 to 6 carbon atoms. R <3> is a vinyl group and methacryl group. n is a natural number between 1 and 3, and m is an integer between 1 and 3
    [12" claim-type="Currently amended] The method of claim 11,
    The organopolymerization initiator is selected from the group consisting of aluminum alkoxide, zirconium alkoxide, titanium alkoxide, 1-methylimidazole, imidazole series, borontrifluoride diethyl isate, benzoyl peroxide, 2.2'-azobisisobutyronitrile Selected manufacturing method
    [13" claim-type="Currently amended] The method of claim 11,
    The thermo-optic coefficient is controlled by controlling the amount of heat or ultraviolet radiation to the polymerizable organosilicon compound.
    [14" claim-type="Currently amended] Thermo-optic optical waveguide device functional organosilicon polymerized by ring-opening reaction of the same or different compounds including organic monomers crosslinkable with an organic group substituted with silicon in the compound represented by the following general formula (2) using a metal alkoxide or an amine group Method for preparing the compound.
    (OR 1 ) n Si- (XR 3 ) m (n + m = 4)
    R 1 is a straight or branched chain alkyl group having 1 to 10 carbon atoms or a hydrogen atom. X is a carbon chain having 3 to 6 carbon atoms. R 3 is glycidoxy. n is a natural number between 1 and 3, and m is an integer between 1 and 3.
    [15" claim-type="Currently amended] The method of claim 14,
    A thermo-optic coefficient is controlled by controlling the amount of a metal alkoxide or amine group to undergo ring-opening reaction to a polymerizable organosilicon compound.
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    同族专利:
    公开号 | 公开日
    KR100558965B1|2006-03-10|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    法律状态:
    2003-01-29|Application filed by 한국과학기술원
    2003-01-29|Priority to KR1020030005908A
    2004-08-06|Publication of KR20040069491A
    2006-03-10|Application granted
    2006-03-10|Publication of KR100558965B1
    优先权:
    申请号 | 申请日 | 专利标题
    KR1020030005908A|KR100558965B1|2003-01-29|2003-01-29|Controlling method of Thermo-optic coefficient of Inorganic-Organic Hybrid Materials for Thermo-Optic Waveguide Devices|
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